Product Details 商品詳細介紹
♦機台特色♦
- 200mm and 300mm wafer handling.
- Wafer carriers: FOUP/FOSB, slot cassette.
- Handling of custom-made wafer carriers (Option).
- Wafer carrier identification (Option: RFID tag / barcode label).
- 13 & 25 slots cassette capability.
- SMART wafer scanning and wafer cross slot detection.
- Vacuum / Bernoulli (Option) thin wafer handling capability.
- User-friendly windows interface.
- SECS/GEM compliance (Option).
ADVANCED ROBOT ARM
- Vacuum fork arm
- Bernoulli wafer arm (Option)
- Thin & warped wafer handling
- Robot with servo closed loop control
GREEN LIGHT MACRO INSPECITON (OPTION)
- Wafer can be tilted for visual inspection, control by joystick.