Product Details 商品詳細介紹
♦機台特色♦
- 200mm and 300mm wafer handling.
- Single loadport.
- Additional loadport (Option).
- Wafer carriers: FOUP/FOSB, slot cassette.
- 13 & 25 slots cassette capability.
- SMART wafer map and wafer cross slot detection.
- Vacuum / Bernoulli thin wafer handling capability.
- 8" wafer with adapter in FOUP (Option).
- Custom-made wafer carriers (Option).
- Wafer carrier identification (Option: RFID tag / barcode label).
- Vision pre-aligner with wafer ID reader OCR capability.
- User-friendly windows interface.
- SECS/GEM compliance (Option).
- Capable to handshake with numerous of conventional tools, such as inspection or tester provide complete handfree wafer handler.
