1. 2x, 3x or 4x wafer cassette (White/Metal) or coin stacked box handling (Option).

2. Handling HWS carrier (Option).

3. 6" & 8" wafers handling (Option - 4", 5" wafer).

4. Handling of 25/13 slots wafer cassette.

5. Advanced wafer handling build-in vacuum end effector (Option - Bernoulli thin wafer handling - Taiko wafer).

6. Advanced robot transfer arm.

7. Wafer flipper arm (Option).

8. Build in SMART wafer pre-aligner.

9. Wafer ID reader (Option).

10. Sorting wafer, pick & place between slot.

11. Packer and unpacker feature.

12. Host interface / SECS/GEM compliance (Option).

13. HEPA/ULPA filter.

14. Industrial PC control.

15. Build in Macro / Micro (Auto-focus) Inspection (Option)

16. Sponge handler (Option)

Customization / Design TO MEET CUSTOMER REQUIREMENT.