♦機台特色♦

1. 12" wafer handling (Optional for 8")

2. Capable to handle jelly jar, coin box and FOSB.

3. Detection of wafer protrusion from cassette

4. Wafer cross slot detection

5. Wafer at cassette mapping graphic

6. Bernoulli end effector wafer handling, build in vacuum selection

7. Advanced 3-axis robot assembly

8. intelligence wafer alignment, wafer centering and notch / flat finding build in robot arm. 

9. Build in WDI OCR Reader

10. Recipe wafer control system

11. Handheld barcode reader for lot tracking.

12. Wafer flipper assembly.

13. PC base software