Product Details 商品詳細介紹
Features:
►Automatic Load/UnLoad Wafer
►Configure for 8” & 12 “wafers Handling
►Vacuum Wafer Chuck
►Barcode Reading/Lot Tracking System
►Visual Inspection under Microscope
►Visual Inspection under Monitor
►Auto Focus Unit
►Motorized XY Theta Stage
►Granite Table with Vibration isolator (Option)
►Smart Auto detect carrier with recipe select
►Secs-Gem Compliance (Option)
►Industrial PC control