Product Details 商品詳細介紹
♦機台特色♦
- Single Input/Output Station FOUP Handling
- Wafer Carrier Present auto detection
- Wafer Detection/Scanning at Cassette
- Automatic FOUP door Open/Close
- Advanced Robot Wafer Handling
- Bernoulli End effector wafer handling, build in vacuum
- Integrated With Roughness Measurement System and Wafer Thickness Measurement System
- Programmable measurement position
- 8" Wafer conversion Kit
- 8" Wafer Cassette 13/25slot
- 8" Thin Wafer Tongue Cassette Handling
- ESD Ionizer blower
- Industrial PC control
