◎ This machine describes the function of macro and micro inspection of wafers.

◎ This standalone machine loads wafers from a FOSB pod to macro and micro inspection station

規格

1  Single Input/Output Station FOUP Handling

2  Wafer Carrier Present auto detection

3  Wafer Detection/Scanning at Cassette

4  Automatic FOUP door Open/Close

5  Advanced Robot Wafer Handling

6  Bernoulli End effector wafer handling, build in vacuum

7  Smart Wafer alignment, Wafer Centering and Notch Finding

8  Integrated to Microscope 5x, 10x, 20x and 50x with Manual Stage Microscope and Camera

9  Wafer Macro Inspection

10 8-inch Wafer conversion Kit

11 8-inch Wafer Cassette 13/25slot

12 8-inch Thin Wafer Tongue Cassette Handling

13 ESD Ionizer blower

14 Industrial PC control