Product Details 商品詳細介紹
♦機台特色♦
- Automatic load/unload wafer.
- Configure for 8" & 12" wafers handling
- Vacuum wafer chuck.
- Barcode reading / lot tracking system.
- Visual inspection under microscope.
- Visual inspection under monitor.
- Autofocus unit.
- Motorized XY theta stage.
- Recipe control / programmable die position.
- E-Mapping editor.
- Customize report generator.
- Granite table with vibration isolator.
- SMART autodetect carrier with receipe select.
- SECS/GEM compliance (Option).
- Industrial PC control.
