Product Details 商品詳細介紹
Feature:
►12” wafer Handling (Optional for 8”)
►4x Loadport For FOSB/FOUP
►Capable to handle Jelly Jar , Coin box and FOSB.
►Detection of Wafer Protrusion Cassette
►Wafer Cross Slot Detection
►Wafer At Cassette Mapping Graphic
►Bernoulli end effector wafer handling, build in vacuum selection
►Advanced 3-axis Robot Assembly
►Intelligence Wafer alignment, Wafer Centering and Notch / Flat Finding
►Build in WDI OCR Reader
►Recipe Wafer Control System
►Handheld Barcode reader Tracking
►Wafer Flipper Assembly
►PC Base Software
• Up To 4x LoadPort For FOSB/FOUP/8-inch Slot Cassette
• Build-in Carrier Presence Sensor & Differentiate Sensor
• A Safe Way to Load and Manual Open FOSB Cover With Slanted Angle & Rotator