1 Input FOUP Loadport
2 Input/Output Metal FOUP Loadport
3 Output FOUP Loadport (NG Wafer)
4 Wafer Carrier Present auto detection
5 Wafer Detection/Scanning at Cassette
6 Automatic Standard FOUP door Open/Close
7 Advanced Robot Wafer Handling
8 Bernoulli Arm Wafer Handling
9 Smart Wafer Alignment
10 Wafer Backside Macro Inspection, CCD Camera
11 8-inch Wafer conversion Kit
12 ESD Ionizer blower
13 Industrial PC control
14 Special 8-inch Wafer Metal Cassette (for 13 slots for 200mm BSC bumped wafer)
15 Special 12-inch Wafer Metal cassette (for 13 slots for 300mm BSC bumped wafer)
16 Operation view video tooling (total: 4 pcs Camera)